

Laser Metrology
LUMOS Product
Process stability is checked through beam profiling and optical measurement data.
Beam Profiler products
LUM-B

From real-time monitoring to precise analysis, this best-selling model delivers both versatility and accuracy.
LUM-B-L

Supporting the industry’s largest coverage area, it perfectly analyzes the uniformity of line beams and large-area annealing processes.
LUM-F

Capable of measuring ultra-fine laser spot size as small as 3 μm, it is optimized for precision machining applications that push the limits of technology to the end.
LUM-Z

By implementing 3D energy distribution through Z-axis scanning, it provides a three dimensional analysis of complex optical characteristics such as TGV Bessel Beams and Stealth Dicing.
IFI

Maintains over 90% uniformity across the entire focal area, enabling an immediate flat-top beam profile without the need for separate adjustments.
Lumosity Software

By integrating ISO-standard-based analysis algorithms with intuitive 2D/3D visualization, it has already proven its efficiency in the semiconductor and display industries.
Customizing

The true value of LUMOS lies in its flexibility. We offer custom-built solutions for specialized optical systems or unique process environments that are difficult to address with standardized products. LUMOS’s engineering team will directly participate in the design process to drive innovation in your manufacturing processes.